Abstract
Samples with nodular defects grown from gold nanoparticles are prepared, and
laser-induced damage tests are conducted on them. Nodular defects, which are in
critical state of damage, are cross-sectioned by focusing on the ion beam and by
imaging using a field emission scanning electron microscope. The crosssectional
profile shows that cracks are generated and propagated along the nodular boundaries
and the HfO2/SiO2 interface, or are even melted. The thermomechanical process
induced by the heated seed region is analyzed based on the calculations of
temperature increase and thermal stress. The numerical results give the critical
temperature of the seed region and the thermal stress for crack generation,
irradiated with threshold fluence. The numerical results are in good agreement with
the experimental ones.
© 2011 Chinese Optics Letters
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